Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator

Belal Ahmad (1) , Hugo Chambon (1) , Pierre Tissier (1) , Aude Bolopion (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In this paper, we propose a laser actuated microgripper that can be activated remotely for micromanipulation applications. The gripper is based on an optothermally actuated polymeric chevron-shaped structure coated with optimized metallic layers to enhance its optical absorbance. Gold is used as a metallic layer due to its good absorption of visible light. The thermal deformation of the chevron-shaped actuator with metallic layers is first modeled to identify the parameters affecting its behavior. Then, an optimal thickness of the metallic layers that allows the largest possible deformation is obtained and compared with simulation results. Next, microgrippers are fabricated using conventional photolithography and metal deposition techniques for further characterization. The experiments show that the microgripper can realize an opening of 40 µm, a response time of 60 ms, and a generated force in the order of hundreds of µN. Finally, a pick-and-place experiment of 120 µm microbeads is conducted to confirm the performance of the microgripper. The remote actuation and the simple fabrication and actuation of the proposed microgripper makes it a highly promising candidate to be utilized as a mobile microrobot for lab-on-chip applications.

Mots clés: Microgripper; Micromanipulation; Optothermal actuation

Domaines: Automatique / Robotique

Belal Ahmad, Hugo Chambon, Pierre Tissier, Aude Bolopion. Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator. Micromachines, 2021, 12 (12), pp.1487. ⟨10.3390/mi12121487⟩. ⟨hal-03561332⟩